孙 铎，吴 刚，朱先征，李南文，李 恒
（无锡德宝水务投资有限公司）
（广东粤海水务投资有限公司）
（上海大学 环境与化学工程学院）
（煤炭高效低碳利用全国重点实验室）
SUN Duo,WU Gang,ZHUXianzheng,et al.Performance Comparison of TFC and TFN Reverse Osmosis Membranes in Treating Semiconductor Wastewater[J].China Water & Wastewater,2026,42(1):22-27.
TFC和TFN反渗透膜处理半导体废水的性能对比
- Title:
- Performance Comparison of TFC and TFN Reverse Osmosis Membranes in Treating Semiconductor Wastewater
- 作者:
- 孙铎1,2， 吴刚1， 朱先征3,4， 李南文4， 李恒5
- （1.无锡德宝水务投资有限公司，江苏 无锡 214028；2.广东粤海水务投资有限公司，广东 深圳 518001；3.上海大学 环境与化学工程学院，上海 200444；4.煤炭高效低碳利用全国重点实验室，山西 太原 030001；5.清华苏州环境创新研究院，江苏 苏州 215163）
- Author(s):
- SUN Duo1，2， WU Gang1， ZHU Xianzheng3，4， LI Nanwen4， LI Heng5
- （1. Wuxi Deppel Water Investment Co. Ltd.， Wuxi 214028， China； 2. Guangdong Yuehai Water Investment Co. Ltd.， Shenzhen 518001， China； 3. School of Environmental and Chemical Engineering， Shanghai University， Shanghai 200444， China； 4. State Key Laboratory of Coal Conversion， Taiyuan 030001， China； 5. Research Institute for Environmental Innovation
Tsinghua， Suzhou 215163， China）
- Keywords:
- reverse osmosis; semiconductor wastewater; reclamation and reuse; thin-film composite (TFC) membrane; thin-film nanocomposite (TFN) membrane
- 摘要:
- 半导体废水因污染物成分复杂且可生化性差，其高效再生回用是半导体行业实现水资源循环利用与“双碳”目标的关键挑战。以华东某半导体再生水厂为研究对象，通过工程化试验对比聚酰胺复合薄膜（TFC）与聚酰胺纳米复合薄膜（TFN）的反渗透（RO）性能差异，系统评估两者在脱盐率、产水量、化学清洗周期及长期稳定性等方面的表现。结果表明，TFN膜在低温及高盐度进水条件下，脱盐率保持在95%以上，通量稳定性优于TFC膜（波动范围为20%~40%），且平均化学清洗周期延长80%以上（从3.35 d提升至6.40 d），具有更好的综合技术经济性。
- Abstract:
- Semiconductor wastewater, characterized by complex pollutants composition and poor biodegradability, poses a critical challenge for efficient reuse in achieving water resource circularity and dual-carbon goals (carbon peaking and carbon neutrality) within the semiconductor industry. This study conducted engineering-scale experiments at a semiconductor wastewater reclamation plant in East China to systematically compare the performance of thin-film composite (TFC) membranes and thin-film nanocomposite (TFN) reverse osmosis (RO) membranes. Key parameters evaluated included desalination efficiency, water production capacity, chemical cleaning frequency, and long-term operational stability. Results demonstrated that the TFN membranes exhibited superior performance under low-temperature and high-salinity conditions, maintaining a stable desalination rate (exceeding 95%) and flux stability, significantly outperforming TFC membranes (fluctuation range: 20%-40%). Moreover, the TFN membranes extended the average chemical cleaning interval by over 80%（from 3.35 days to 6.40 days）, significantly enhancing the overall techno-economic efficiency.
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